The Manufacturing Execution System (MES) for the semiconductor industry, whose functional scope can cover front-end, back-end and R&D scenarios, will be presented. This includes recipe management, the planning and execution of production trials and support for typical processes such as precursor wafers. An integrated data platform contextualizes and analyzes data from the shop floor as well as from multiple production sites and the entire supply chain.
Trial management is a critical functionality in semiconductor manufacturing. The integration of tests in the MES allows the parallel processing of production batches with test wafers during ongoing production. Thanks to unrestricted tracking, data from the test runs can be automatically recorded for evaluation.
The integrated recipe management module offers machine integration and strategies for automatic recipe control to avoid possible errors, rework or rejects.
For precursor wafers that are removed from the carrier and sent ahead to test a process, the send-ahead functionality in the MES ensures that they are correctly processed, tracked and returned to the appropriate batch after removal. The system also enables the entire batch to be sent ahead by defining the slots to be processed in the carrier. The remaining wafers are not taken into account until the result is available.
Hall C1 Booth 736
