The Atlas Copco Group, a Swedish international industrial group, has acquired the iTrap® mass spectrometer technology from ZEISS. Atlas Copco will integrate the iTrap technology into the Semiconductor Chamber Solutions unit within the Vacuum Technology business area.
ZEISS has developed the iTrap ion trap mass spectrometer for real-time measurement of process gases. The technology is used in process analysis and control in the semiconductor market. iTrap analyzes and monitors important chemical processes in vacuum chambers of semiconductor device manufacturing equipment and other applications. This is the first transaction of a ZEISS venture. Through the sale, this innovation will benefit from enhanced opportunities for market success that are available externally.
Atlas Copco will integrate the iTrap technology into its subsidiary Edwards to create synergies with its vacuum technology solutions. Edwards is a world leader in this field and also has a global application and distribution network with locations close to all major customers in the relevant markets.
With the sale of the iTrap business, all assets including patents and key employees will be transferred to the buyer. The parties have agreed not to disclose the purchase price or any further details of the purchase agreement. The transaction was completed on August 3, 2020.
