CyberOptics from Minneapolis (Minnesota, USA) will be showcasing its new WaferSense Auto Teaching System (ATS2), the ReticleSense Auto Teaching System (ATSR) and the Inline Particle Sensor at Semicon Europa 2022. ATS2 and ATSR are multi-camera sensors with CyberSpectrum software for teaching wafer and mask transfer for precise alignment of the production tools.
The sensors capture three-dimensional offset data (x, y and z) in real time to quickly align the wafer and mask positions without having to open the tools. This enables repeatable and reproducible setups and maintenance checks, and eliminates variations with changing operators.
CyberOptics will also be exhibiting the Inline Particle Sensor (IPS) together with the CyberSpectrum software for the detection of particles in gas and vacuum lines down to 0.1 μm. This sensor is particularly important for EUVL particle monitoring tools. The sensor is an extension of the well-known Airborne Particle Sensor (APS/APSRQ) technology, which is considered a Best-Known Method (BKM) in Fabs. The WaferSense and ReticleSense sensors are widely used in process steps such as the determination of leveling, vibration, gapping, relative humidity, resistance and suspended particles. They enhance this to improve yields, manufacturing processes and tool uptime.
