Piezoelectric layers play a key role in the manufacture of ultrasound microscopes, for example, which examine ever smaller semiconductor components and biological cell structures. For higher frequencies and thus better resolution of ultrasonic microscopes, ever shorter distances between the sound pulses are necessary. This greatly increases the demands on coating and process quality.
As part of the BMBF-funded DigiMatUs project (FKZ 13XP5187D), the Fraunhofer Institute for Electron Beam and Plasma Technology FEP is developing a digital twin of the coating process for piezoelectric thin films based on aluminum nitride (AlN) and aluminum scandium nitride (AlScN). The coating deposition takes place at the Fraunhofer FEP cluster facilities using pulse magnetron sputtering.
The various process parameters and influencing factors and their effects on the layer properties are investigated and digitally recorded. The work should contribute to a significant improvement in the performance and reproducibility of ultrasonic sensors.
