For around ten years, the Helmholtz-Zentrum Dresden-Rossendorf (HZDR) has been providing industry with fast and direct access to the facilities at the Ion Beam Center via its transfer company HZDR Innovation GmbH.
HZDR Innovation recently opened a new site in Trnava, Slovakia, in order to expand the capacities that are in high demand. After the Dresden-based company and its local partners upgraded an accelerator at the Slovakian Technical University in Bratislava, companies can now refine wafers for power electronics there.
The facility primarily enables hydrogen and helium implantations with ion energies of several megaelectronvolts. In this way, the demand from industrial customers to have more wafers processed than was previously possible at the Dresden-Rossendorf site alone can be met. There is a contractual agreement with the Slovakian Technical University of Bratislava (STU) for the use of the accelerator in Trnava. The installation of a further high-energy accelerator and an end station for carrying out complementary low-energy implantations are planned.
