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During component coating already deposited particles are incorporated into the growing layer and continuously deposited on the surface. There a characteristic defect growth structure is formed, which is reflected in a particle surface as well as a roughness. In this work, it is shown that the production of doped carbon films using composite cathodes leads to a significant reduction in arc-induced particle emission. While Part 1 covered origins of growth defects, methods of surface characterization, experimental setups and measurement methods, the final part of the article delivers the measurement results and highlights the conclusions.

With optical surface quantification methods doped and undoped carbon coatings deposited by Laser Arc Technology are analyzed. The article shows, that by producing doped carbon coatings using composite cathodes also a significant reduction of arc-induced particle emission is observed. A surface evaluation method, particularly developed for this purpose, shows a significant reduction in particle area coverage. Part 1 covers the origins of growth defects, methods of surface characterization and the experimental setup and measurement methods.